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The research and development of nanometer diamond film synthesized by chemical vapor deposition method
Post Date: 04 Nov 2008 Viewed: 864
(Tiandi Orient Superhard Materials Co., Ltd, 100018)
Abstract In this paper, we introduced the nanometer diamond film systemically and discussed the synthesis of nanometer diamond film used by CVD. Finally, we reviewed the development of Beijing tiandi orient superhard materials company researching the nanometer diamond film deposited by CVD in the near years.
Key words nanometer diamond film CVD microwave hot filaments
