Abstract: The micro abrasive jet machining (MAJM) technology was used to make micro channels on the glass. Based on the tests with or without mask, the structure profile, erosion rates of material and flux effect of abrasive grits, under different machining parameters, such as nozzle standoff distance, air pressure, nozzle sweeping speed, and abrasive grits flow rate, are investigated. The results show that, when the nozzle standoff distance is 4mm, the air pressure is 0.5MPa, the nozzle sweeping speed is 1.0mm/s, the abrasive mass flow is 0.117g/s, the best micro channel profile can be obtained. By masked machining, a better channel profile with steep walls and flat bottom can be obtained owing to the secondary rebounding effect of the abrasive particles.

Keywords: micro abrasive jet machining      micro channel         masking                 structure profile